MEMS​

MEMS, inomiririra MicroElectroMechanical Systems madiki madiki chip scale micromachines akaumbwa nezvikamu zviri pakati pe1 kusvika zana micrometer muhukuru (micrometer inosvika miriyoni imwe yemamita) uye midziyo yeMEMS inowanzosiyana muhukuru kubva 20 micrometers_cc781905-5cde-3194-bb3bd5b-158 (20 mamiriyoni emamita) kusvika pamirimita. Midziyo mizhinji yeMEMS imazana mashoma emamicron mhiri.Inowanzo sanganisira yepakati unit iyo inogadzirisa data, iyo microprocessor uye akati wandei zvidimbu zvinodyidzana nekunze senge microsensors. Pazviyero zvidiki zvakadaro, mitemo yefizikisi yefizikisi haiwanzo kubatsira. Nekuda kweMEMS 'hombe yenzvimbo kusvika kuvhoriyamu reshiyo, mhedzisiro yepasi senge electrostatics uye wetting inotonga vhoriyamu mhedzisiro senge inertia kana thermal mass. Naizvozvo, dhizaini nekusimudzira MEMS zvinoda ruzivo rwakakwana mumunda pamwe nesoftware chaiyo inotora iyi isiri-classical fizikisi mitemo mukufunga.

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MEMS yakave inoshanda kunyanya mukati memakumi mashoma emakore apfuura mushure mekugona kugadzirwa vachishandisa yakagadziridzwa semiconductor mudziyo wekugadzira matekinoroji, ayo aiwanzo shandiswa kugadzira zvemagetsi. Izvi zvinosanganisira kuumba uye plating, kunyorova etching (KOH, TMAH) uye yakaoma etching (RIE neDRIE), magetsi ekuburitsa machining (EDM), yakaonda firimu deposition uye mamwe matekinoroji anokwanisa kugadzira midziyo midiki.

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Kana iwe uine pfungwa nyowani yeMEMS asi usina hunyanzvi hwekugadzira maturusi uye/kana hunyanzvi hwakakodzera, tinogona kukubatsira. Mushure mekugadzira, kusimudzira uye kugadzirwa tinogona kugadzira yakagadziridzwa bvunzo Hardware uye software yechigadzirwa chako cheMEMS. Isu tinoshanda neakawanda akatangwa ekutanga ehunyanzvi mukugadzira MEMS. Ose ari maviri 150mm uye 200mm mawafer anogadziriswa pasi pe ISO/TS 16949 uye ISO 14001 akanyoreswa uye RoHS nharaunda dzinoenderana. Isu tinokwanisa kuita inotungamira kumucheto tsvagiridzo, dhizaini, kusimudzira, kuyedza, qualification, prototyping pamwe nepamusoro vhoriyamu yekushambadzira kugadzirwa. Zvimwe zvakakurumbira zveMEMS zvishandiso mainjiniya edu ane ruzivo mune anosanganisira:

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• Accelerometers

• Gyroscopes/ Gyros

• Magnetometers

• Maikorofoni

• Resonators

• Optical MEMS(zvakadai sedhijitari mapurojekita, ese optical fiber optic switch)

• MEMS Actuatorsuye Sensors (senge inofamba sensor, pressure sensor)

• RF Swichi & Varactors

• Vakohwi Vasimba

• Micro-Bolometers

 

Tiny MEMS sensors uye actuators yakagonesa kushanda kutsva mumafoni akangwara, mahwendefa, mota, mapurojekita… nezvimwe. uye yakakosha kuInternet yezvinhu (IoT). Kune rimwe divi, MEMS inopa matambudziko einjiniya akasarudzika, anosanganisira asiri-akajairwa ekugadzira maitiro, akawanda-fizikisi kupindirana, kubatanidzwa neICs, uye tsika hermetic yekurongedza zvinodiwa. Pasina MEMS-chaiyo dhizaini chikuva, kazhinji zvinotora makore mazhinji kuunza chigadzirwa cheMEMS kumusika. Isu tinoshandisa maturusi epamusoro kugadzira nekugadzira MEMS. Tanner MEMS Dhizaini inotigonesa 3D MEMS dhizaini nerutsigiro rwekugadzira mune imwe nharaunda yakabatana, uye inoita kuti zvive nyore kubatanidza MEMS michina ine analog/mixed-signal processing circuitry pane imwechete IC. Inosimudzira kugadzirwa kweMEMS zvishandiso kuburikidza nemakanika, zvinopisa, acoustic, magetsi, electrostatic, magineti uye fluid analysis. Mamwe maturusi esoftware kubva kuCoventor anotipa mapuratifomu ane simba eMEMS dhizaini, simulation, ongororo uye maitiro ekuenzanisira. Coventor's platform inogadzirisa matambudziko einjiniya eMEMS akadai sekudyidzana kwefizikisi yakawanda, kusiyanisa kwemaitiro, kubatanidzwa kweMEMS + IC, MEMS + kupindirana kwepakeji. Mainjiniya edu eMEMS vanokwanisa kutevedzera uye kutevedzera maitiro echishandiso uye kudyidzana vasati vazvipira kugadzira chaiko, uye mumaawa kana mazuva, vanogona kutevedzera kana kutevedzera mhedzisiro ingadai yakatora mwedzi yekuvaka uye kuyedza mumucheka. Zvimwe zvezvishandiso zvepamberi zvatinoshandisa vagadziri veMEMS ndeaya anotevera.

 

Zvekufananidza:

• Tanner MEMS Dhizaini Inoyerera kubva kuMentor

• MEMS+, CoventorWare, SEMulator3D kubva kuCoventor

• IntelliSense

• Comsol MEMS Module

• ANSYS

 

Kudhirowa masks:

• AutoCAD

• Vectorworks

• Layout Editor

 

For modelling:

• Solidworks

 

Pakuverenga, analytical, nhamba yekuongorora:

• Matlab

• MathCAD

• Mathematica

 

Inotevera ipfupi runyorwa rweMEMS dhizaini & basa rekusimudzira ratinoita:

• Gadzira iyo MEMS 3D modhi kubva pakurongeka

• Dhizaini mutemo wekutarisa yeMEMS manufacturability

• System-level simulation yeMEMS zvishandiso uye IC dhizaini

• Yakazara layer & dhizaini geometry kuona

• Kugadzira otomatiki nemaseru ane parameterized

• Chizvarwa chemaitiro ekuzvibata emidziyo yako yeMEMS

• Yepamberi mask dhizaini uye yekuongorora kuyerera

• Kutengeswa kunze kwemafaira eDXF   

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MICROFLUIDICS

Yedu microfluidics mudziyo dhizaini uye kusimudzira mashandiro ane chinangwa chekugadzira michina uye masisitimu umo mavhoriyamu madiki emvura anobatwa. Isu tine kugona kugadzira michina yemicrofluidic iwe uye tinopa prototyping & micromanufacturing tsika yakarongerwa zvikumbiro zvako. Mienzaniso yemidziyo yemicrofluidic mamicro-propulsion devices, lab-on-a-chip systems, micro-thermal devices, inkjet printheads nezvimwe. Mune microfluidics isu tinofanirwa kubata nekunyatso kudzora uye kushandura zvinwiwa zvakamanikidzwa kune sub-mimita matunhu. Fluids inofambiswa, inosanganiswa, inoparadzaniswa uye inogadziriswa. Mu microfluidic system zvinwiwa zvinofambiswa uye zvinodzorwa pamwe nekushingairira kushandisa madiki mapombi nemamicrovalve nezvimwe zvakadaro kana kungotora mukana we capillary forces. Iine lab-on-a-chip masisitimu, maitiro anowanzo itwa murabhoritari anoitwa miniaturized pane imwechete chip kuitira kusimudzira kushanda nesimba uye kufamba pamwe nekuderedza sampuli uye reagent mavhoriyamu.

Mamwe makuru mashandisirwo ezvishandiso zvemicrofluidic uye masisitimu ndeaya:

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- Marabhoritari pane chip

- Kuongororwa kwezvinodhaka

- Glucose bvunzo

- Chemical microreactor

- Microprocessor kutonhora

- Micro mafuta masero

- Mapuroteni crystallization

- Kukurumidza zvinodhaka kushanduka, kushandiswa kwemasero ega

- Single sero zvidzidzo

- Tunable optofluidic microlens arrays

- Microhydraulic & micropneumatic system (mapombi emvura,

mavharuvhu egasi, masisitimu ekusanganisa… nezvimwewo)

- Biochip yekutanga yambiro masisitimu

- Kuonekwa kwemakemikari marudzi

- Bioanalytical zvikumbiro

- Pa-chip DNA uye kuongorora mapuroteni

- Nozzle spray zvishandiso

- Quartz inoyerera maseru ekuona mabhakitiriya

- Dual kana akawanda droplet chizvarwa machipisi

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AGS-Engineering inopawo kubvunza, dhizaini uye kusimudzira chigadzirwa mumagasi uye emvura masisitimu uye zvigadzirwa, pazvikero zvidiki. Isu tinoshandisa maturusi epamusoro eComputational Fluid Dynamics (CFD) pamwe nekuyedza murabhoritari kuti tinzwisise uye nekuona maitiro akaomarara ekuyerera. Mainjiniya edu emicrofluidics akashandisa maturusi eCFD uye microscope kuratidza iyo microscale fluid yekufambisa zviitiko mune porous media. Isu zvakare tine kudyidzana kwepedyo nemafoundries kutsvaga, kugadzira. Gadzira uye upe microfluidic & bioMEMS zvikamu. Tinogona kukubatsira kugadzira & kugadzira yako wega microfluidic chips. Yedu ine ruzivo chip dhizaini timu inogona kukubatsira iwe kuburikidza nedhizaini, prototyping uye kugadzirwa kwemajenya madiki uye huwandu hwehuwandu hwemicrofluidic machipisi kune yako chaiyo application. Kutanga nemidziyo pamapurasitiki inokurudzirwa kuti iedze nekukurumidza sezvo zvichitora nguva shoma uye mutengo wekugadzira zvichienzaniswa nemidziyo paPDMS. Tinogona kugadzira Microfluidic mapatani pamapurasitiki akadai sePMMA, COC. Tinogona kuita photolithography inoteverwa nenyoro lithography kugadzira microfluidic mapatani paPDMS. Isu tinogadzira simbi masters, isu tiri nekugaya mapatani paBrass neAluminium. Kugadzirwa kwemudziyo paPDMS uye kugadzira mapatani pamapurasitiki nesimbi zvinogona kupedzwa mukati memavhiki mashoma. Isu tinokwanisa kupa zvinongedzo zvemapateni akagadzirwa pamapurasitiki kana takumbira senge chiteshi chekubatanidza chinoenderana ne1mm chiteshi saizi pamwe nekukodzera kubatanidza 360 micron PEEK capillary chubhu. Male mini luer ane simbi pini musangano anogona kupihwa kubatanidza tygon chubhu ye 0.5 mm yemukati dhayamita pakati pemvura madoko nepombi sirinji. Mvura yekuchengetera madhirigi ekukwanisa 100 μl. inogonawo kupihwa. Kana iwe uchitova nedhizaini, unogona kutumira mune Autocad, .dwg kana .dxf mafomati.

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